Caractérisation des propriétés mécaniques de couches minces déposées par plasma et de surfaces polymériques traitées par plasma
Abstract (summary)
In this work, several indentation (Fisherscope H100, NHT) and scratch techniques (MST, LLMST) are used for the characterisation of the mechanical properties of two types of coatings (SiO2 and SiN1.3), plasma deposited on different substrates (polycarbonate (PC), silicon and glass), and of plasma. (N2 and He) modified PC surfaces. To complement the mechanical characterisation, X-ray photoelectron spectroscopy is used for chemical and structural analysis while AFM is used to image the surface topography.
Hardness, elasticity and stiffness were found to increase after plasma exposition of the PC surface. Modification of the mechanical properties of a thin surface layer, also called interphase, is due to a crosslinking effect of the vacuum ultraviolet radiations from the plasma.
Deposition of a SiO2 film on plasma modified PC shows that the presence of the interphase prior to the deposition establish a progressive hardness variation from the coating to the substrate. Similarly, the presence of the interphase improved the adhesion and scratch resistance of SiN1.3 films deposited on plasma modified PC. (Abstract shortened by UMI.)
Indexing (details)
Condensed matter physics