Abstract/Details

Stabilité thermique des propriétés optiques, mécaniques et microstructurales des oxydes de tantale et de niobium fabriqués par plasma

Masse, Jean-Philippe.   Ecole Polytechnique, Montreal (Canada) ProQuest Dissertations Publishing,  2006. MR16815.

Abstract (summary)

Tantalum and niobium oxide optical thin films were prepared at room temperature by Plasma-Enhanced Chemical Vapor Deposition (PECVD) using different modes of deposition (RF, MW and MW/RF) using tantalum and niobium pentaethoxide (M(OC2H5)5) precursors. They were then tested for their stability.

The evolution of the films' optical and microstructural properties as a result of annealing was studied over a broad temperature range from room temperature up to 900°C. The as-deposited films were amorphous, their refractive index, n, and extinction coefficient, k, at 550 nm were n = 2.13 and k < 10-4</super> for Ta2O5, and n = 2.24 and k < 10-4</super> for Nb2O 5. The films contained a small amount of residual carbon (∼ 2--6 at. %) bonded mostly to oxygen. During annealing, the onset of crystallization was observed at approximately TC = 650°C for Ta2O5 and at TC = 450°C for Nb2O5. Upon annealing close to T 1 (300°C for Nb2O5 and 400°C for Ta 2O5), n at 550 nm decreased by less than 1%. During annealing, a phase transition from the δ- (hexagonal) phase to the L- (orthorhombic) phase was observed between 800°C and 900°C for Ta2O5, and between 600°C and 700°C for Nb2O5. (Abstract shortened by UMI.)

Indexing (details)


Subject
Optics
Classification
0752: Optics
Identifier / keyword
Pure sciences
Title
Stabilité thermique des propriétés optiques, mécaniques et microstructurales des oxydes de tantale et de niobium fabriqués par plasma
Alternate title
Thermal Stability of Optical, Mechanical and Microstructural Properties of Tantalum and Niobium Oxides Fabricated by Plasma
Author
Masse, Jean-Philippe
Number of pages
130
Publication year
2006
Degree date
2006
School code
1105
Source
MAI 45/01M, Masters Abstracts International
Place of publication
Ann Arbor
Country of publication
United States
ISBN
978-0-494-16815-8
University/institution
Ecole Polytechnique, Montreal (Canada)
University location
Canada -- Quebec, CA
Degree
M.Sc.A.
Source type
Dissertation or Thesis
Language
French
Document type
Dissertation/Thesis
Dissertation/thesis number
MR16815
ProQuest document ID
304924883
Copyright
Database copyright ProQuest LLC; ProQuest does not claim copyright in the individual underlying works.
Document URL
https://www.proquest.com/docview/304924883/abstract