Scanning probe metrology of semiconductor line edge roughness
Orji, Ndubuisi George.
The University of North Carolina at Charlotte ProQuest Dissertations Publishing, 2004. 3152366.
Document Preview
Copyright information
Database copyright ProQuest LLC; ProQuest does not claim copyright in the individual underlying works.
Access to the complete full text
This is a short preview of the document. Your library or institution may give you access to the complete full text for this document in ProQuest.
Alternatively, you can purchase a copy of the complete full text for this document directly from ProQuest using the option below: