Abstract/Details

MEMS bandpass filters based on cyclic coupling architectures


2009 2009

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Abstract (summary)

Bandpass filters based on resonant microelectromechanical systems (MEMS) technology have the unique advantage of exploiting the benefits of mechanical filters, namely their high quality factors and good temperature stability, while addressing the challenges associated with manufacturing costs and size, and enabling integrated fabrication with other on-board electronics. While prior works have demonstrated the high quality factors (10,000-25,000) and center frequencies (1-3 GHz) of microelectromechanical filters, the optimality of existing filter architectures and their associated performance metrics are yet to be fully examined. The current work investigates the relative utility of micromechanical designs based upon cyclic and all-to-all coupling architectures. Specifically, these architectures are benchmarked against conventional open-chain filter designs, and filter performance metrics, as well as robustness characteristics, are studied. The work also provides an overview of the fabrication sequence and the experimental setup designed to characterize the proposed filters.

Indexing (details)


Subject
Electrical engineering;
Mechanical engineering
Classification
0544: Electrical engineering
0548: Mechanical engineering
Identifier / keyword
Applied sciences; All-to-all coupling; Bandpass filters; Cyclic coupling; MEMS; Micromechanical
Title
MEMS bandpass filters based on cyclic coupling architectures
Author
Chivukula, Venkata Bharadwaj
Number of pages
155
Publication year
2009
Degree date
2009
School code
0183
Source
MAI 48/05M, Masters Abstracts International
Place of publication
Ann Arbor
Country of publication
United States
ISBN
9781109765724
Advisor
Rhoads, Jeffrey F.
Committee member
Bajaj, Anil K.; Peroulis, Dimitrios
University/institution
Purdue University
Department
Mechanical Engineering
University location
United States -- Indiana
Degree
M.S.M.E.
Source type
Dissertations & Theses
Language
English
Document type
Dissertation/Thesis
Dissertation/thesis number
1475982
ProQuest document ID
375406530
Copyright
Database copyright ProQuest LLC; ProQuest does not claim copyright in the individual underlying works.
Document URL
http://search.proquest.com/docview/375406530
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