Abstract/Details

MEMS resonators for communications transceivers


2010 2010

Other formats: Order a copy

Abstract (summary)

A potentially interesting use of MEMS devices is to implement them in RF transceiver designs. Integrated MEMS resonators or filters have the potential to simplify the transceiver system, improve the performance, reduce the size and lower the cost.

Several types of MEMS resonators and filters are reviewed: clamped-clamped beam resonators, free-free beam resonators and contour-mode disk or ring resonators. Each type has some advantages over traditional SAW or FBAR filters, but there are still some problems that remain.

The major focus of this dissertation is on the modeling, design, fabrication and testing of a MEMS resonator that utilizes torsional-mode vibration. The primary torsional resonance frequency is designed to be in the range of 7.5-15 MHz. The equivalent circuit is derived by analytical modeling in order to facilitate system and circuit designs. Simulations with Finite Element Analysis tools have also been performed to make comparisons with analytical modeling. Nonlinearity effects that can limit performance are also discussed. The fabrication process is then described and finally the optical testing results are compared with the derived models. The results of the testing confirm that the performance of the fabricated devices is consistent with the modeling and simulations. These results furthermore confirm that the devices meet the requirements for communications transceivers.

Potential future areas of study are outlined. This future work includes: obtaining electrical test results with a PCB and developing multiple paddle structures to either lower the input and output impedance or to serve as fully differential resonators.

Indexing (details)


Subject
Electrical engineering
Classification
0544: Electrical engineering
Identifier / keyword
Applied sciences; MEMS; Optical testing; Polysilicon processing; Resonators; Surface micromachining; Transceivers
Title
MEMS resonators for communications transceivers
Author
Wang, Lifeng
Number of pages
105
Publication year
2010
Degree date
2010
School code
0010
Source
DAI-B 71/06, Dissertation Abstracts International
Place of publication
Ann Arbor
Country of publication
United States
ISBN
9781124027517
Advisor
Phillips, Stephen
University/institution
Arizona State University
University location
United States -- Arizona
Degree
Ph.D.
Source type
Dissertations & Theses
Language
English
Document type
Dissertation/Thesis
Dissertation/thesis number
3410547
ProQuest document ID
503375660
Copyright
Database copyright ProQuest LLC; ProQuest does not claim copyright in the individual underlying works.
Document URL
http://search.proquest.com/docview/503375660
Access the complete full text

You can get the full text of this document if it is part of your institution's ProQuest subscription.

Try one of the following:

  • Connect to ProQuest through your library network and search for the document from there.
  • Request the document from your library.
  • Go to the ProQuest login page and enter a ProQuest or My Research username / password.