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Scholarly Journal

ION LITHOGRAPHY APPLICATION FOR NANOSCALE CHANNEL FORMATION IN GLASS MICROFLUID CHIPS

Evstrapov, A; Mukhin, I; Kukhtevich, I V; Bukatin, A. Nauchno-Tekhnicheskii Vestnik Sankt-Peterburgskogo Gosudarstevennogo Universiteta Informatsionnykh Tekhnologii, Mekhaniki, i Optiki; Saint Petersburg Vol. 10, Iss. 4, (Jul/Aug 2010).