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Investigation of High Quality AlN Template By Using PVD-AlN Layer With Annealing Process

Alternate title: 利用退火製程於物理氣象沉積法製備之氮化鋁薄膜開發高品質氮化鋁模板之研究
(葉怡勻) . 
 National Yang Ming Chiao Tung University ProQuest Dissertations & Theses,  2019. 31583400.